High vacuum in-situ two-step refining process for high purity material

一种高纯材料的高真空原位两步精炼方法

Abstract

本发明公开了一种高纯以及超高纯材料的高真空原位两步精炼方法,其特点是在高真空条件下利用双加热丝扩散炉独立加热坩锅的上部与下部,从而在不同阶段使坩锅形成上高下低或上低下高的温度分布,然后分两步加热坩锅分别有效去除高饱和蒸汽压杂质以及低饱和蒸汽压杂质,最终获得高纯材料的方法。整个生产过程与大气隔离,极大地减少了大气对原料的污染。该方法具有产品质量高、生产能力大、性能稳定、可靠以及对环境无污染等特点,适合于高纯以及超高纯材料的生产,特别是高活性高纯材料的制备。
The high vacuum in-situ two-step refining process for high purity material features that under high vacuum condition, one diffusion furnace with two independent heating wires is used in heating the upper part and lower part of the crucible separately so as to form different temperature distribution inside the crucible in different stages, and the crucible is heated in two steps so as to eliminate high saturated vapor pressure impurities and low saturated vapor pressure impurities separately and to obtain high purity material ultimately. The refining process has greatly reduced contamination of atmosphere on the material, high product quality, great production capacity, stable performance, no environmental pollution and other features, and is suitable for producing high purity material, especially producing high purity material with high activity.

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